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Metrology software for in-plane characterization of MEMS

C. Yamahata, E. Sarajlic, M. Stranczl, G.J.M. Krijnen, M.A.M. Gijs

Keywords: sub-pixel resolution, Fourier transform image analysis, MATLAB GUI

Screenshot of the software nano+.

We have developed a software that enables the straightforward measurement of in-plane linear displacements of MicroElectroMechanical Systems (MEMS) using videos recorded with a CCD camera attached to a microscope.

→ Journal article associated with this research [JMEMS Letters, J. Microelectromech. Syst. 19 (5), pp. 1273-1275, 2010].

The software (nano+)
is available free of charge at this URL: anoplus/

Presentation given at the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11, Beijing, China).  

Last modified: March 10th, 2015