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  • WHITE PAPER: Surface treatment by ion implantation
      We recently wrote a technical report on surface treatment by ion implantation.
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INTRODUCTION
C. Yamahata, Ph.D. (2005) and M.Sc. (2000) in Microengineering, graduated from the EPFL (Lausanne, Switzerland).

My R&D activities are mainly focused on the development of Micro Electro Mechanical Systems (MEMS) dedicated to scientific instrumentation.
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motorized rotary union Photograph of a motorized rotary union designed for high vacuum.


capillary passive valve Photograph of a setup using the principle of capillary passive valve to interface a bio-MEMS device with a chamber filled with a culture medium.
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photo microtweezers Photograph of Silicon Microtweezers fabricated by Silicon-On-Insulator (SOI) technology.
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