Metrology software for MEMS characterization

Nano+ is a software that enables the straightforward measurement of in-plane linear displacements of MicroElectroMechanical Systems (MEMS) using videos recorded with a CCD camera attached to a microscope.

With its user-friendly graphical interface, nano+ can be efficiently used to automate video analysis and extract the data to Excel. The underlying algorithm is based on the Discrete Fourier Transform phase-shift method.

The self-extracting executable software is a standalone application based on MATLAB® and the Image Processing Toolbox™ (The MathWorks, Inc.) that can be run without MATLAB on Microsoft Windows operating systems.
Software compatibility successfully tested on Windows 7, XP, Vista and 2000.

If you use this program to analyze your data, then please:
  1. Send us a copy of your paper.
  2. Make reference to the following article:
    C. Yamahata, E. Sarajlic, G.J.M. Krijnen, M.A.M. Gijs,
    "Subnanometer translation of microelectromechanical systems measured by discrete Fourier analysis of CCD images,"
    Journal of Microelectromechanical Systems 19 (5), pp. 1273-1275, 2010.

Download nano+ program [8 MB] (Operating System: Microsoft Windows 7, XP, 2000 or Vista.)
The package includes (i) the executable file, (ii) a PDF tutorial, (iii) video samples.

1) Copy the downloaded file in a folder of your convenience (for example in C:\Program Files\).
2) Double click on the file to unpack the files and complete the installation.
3) Run the software: A shortcut icon is placed on the Windows desktop.

Note: Users who do not have MATLAB installed on their systems can run nano+ as a standalone application.
In that case, they must download the MATLAB Component Runtime Installer 7.11 [MCRInstaller.exe, 170 MB].

MATLAB Compiler was designed to work with a large range of applications that use the MATLAB programming language. Because of this, run-time libraries are large.
In addition, since the MCR technology provides full support for the MATLAB language, including the Java programming language, starting the compiled application takes approximately the same amount of time as starting MATLAB.

Slideshow, demonstration video & screenshots

In this slideshow, the software is presented through measurements performed on various MEMS devices featuring periodic microstructures.
Download the PDF presentation [1.5 MB].

Demonstration video showing the software in action. The example chosen for the demonstration is that of a linear stepper micromotor moving back and forth.
Download the video clip [wmv, 7.1 MB] or watch it on YouTube [1 min].

Screenshots of the software nano+.
Screenshot (nano+ software) Screenshot (nano+ software)

Excel file generated with nano+ [Download the file].
Excel sample file

© Christophe Yamahata - 04/2010