Electromagnetically actuated valveless micropump
( Former project )C. Yamahata, F. Lacharme, M. A. M. Gijs
Keywords: valveless, nozzle, diffuser, micropump, Lab-On-a-Chip, glass, PMMA, powder blasting, electromagnetic actuation |
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Zoom on the inlet diffuser of a glass valveless micropump. The channel is 300 µm thick
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